A set of interface standards was developed as an initiative of the semiconductor industry which provides a solution for this challenge. The standards are called SEMI E120 - Common Equipment Model; SEMI E125 - Equipment Self Description; SEMI E132 - Authenication (Security); SEMI E134 - Data Collection Management.
There is a good document which describes the motivation and how the SEMI Interface-A interfaces are functioning at http://www.sematech.org/meetings/archives/emanufacturing/20051130/03-EDA.... Also some use cases are shown there. The single standards can be purchased at http://www.semi.org/en/Store/Standards/.
But there are also ready installations of standard compliant interfaces available for the equipment-side and for the client side (http://www.peergroup.com, http://www.cimetrix.com).